FOSSF Silicon - User contributions [en]

Gold Shuttle

2026-03-20T22:09:18Z

JohnDMcMaster:

Goal: run an MVP shuttle run and bring wafers to open sauce 2026

TODO:

* Document existing fabrication process better
* Set back up in SF
** Grab ez bake litho system out of storage
** Acquire lab space (WIP)
** Fix sputter coater
* Measure maximum resolution
* Make PDK
* Wafer floorplan
** Probably 3x3
* Solicit first cohort of contributors
** Start by sourcing from FOSSF discord

== Previous work ==
[[File:Gold shuttle poc.png|none|thumb]]
[[File:Az-p4620 1.png|none|thumb]]
Above: IIRC used this, but a UVC PR would probably also work

Equipment used:

* Maasi spin coater
** Production used 2, but you can get away with 1
** Production configuration: 1 for cleaning, 1 for PR
* "ez bake lithography" exposure machine
* Masks
** 3d printed frame + transparency
* Printer
** I used a laser printer
Simple / existing gold fabrication process:

* Mask fabrication
** Laser printer a couple of times through onto transparency
** Cut to size
* Clean 2" wafer
** Strip photoresist by leaving it in for longer
** Clean with IPA and spin at max speed (8k RPM)
** Sometimes lightly brushed wafer when needed
* Sputter coat gold
* Spin coat PR
* Expose mask
* Develop PR using KOH
* Etch gold using NaI/I
* Clean wafer
* Place into membrane box

Mask exposure using "ez bake lithography"

Some early notes from that [https://docs.google.com/document/d/17HMt2Zzm5FRwCRLVQvpPXudmmuqpur_HYsEFmfIFAqE/edit?tab=t.0 can be found here]

There are

Gold Shuttle

2026-03-20T22:07:20Z

JohnDMcMaster: Created page with "Goal: run an MVP shuttle run and bring wafers to open sauce 2026 == Previous work == thumb thumb Above: IIRC used this, but a UVC PR would probably also work Equipment used: * Maasi spin coater ** Production used 2, but you can get away with 1 ** Production configuration: 1 for cleaning, 1 for PR * "ez bake lithography" exposure machine * Masks ** 3d printed frame + transparency * Printer ** I used a las..."

Goal: run an MVP shuttle run and bring wafers to open sauce 2026

== Previous work ==
[[File:Gold shuttle poc.png|none|thumb]]
[[File:Az-p4620 1.png|none|thumb]]
Above: IIRC used this, but a UVC PR would probably also work

Equipment used:

* Maasi spin coater
** Production used 2, but you can get away with 1
** Production configuration: 1 for cleaning, 1 for PR
* "ez bake lithography" exposure machine
* Masks
** 3d printed frame + transparency
* Printer
** I used a laser printer
Simple / existing gold fabrication process:

* Mask fabrication
** Laser printer a couple of times through onto transparency
** Cut to size
* Clean 2" wafer
** Strip photoresist by leaving it in for longer
** Clean with IPA and spin at max speed (8k RPM)
** Sometimes lightly brushed wafer when needed
* Sputter coat gold
* Spin coat PR
* Expose mask
* Develop PR using KOH
* Etch gold using NaI/I
* Clean wafer
* Place into membrane box

Mask exposure using "ez bake lithography"

Some early notes from that [https://docs.google.com/document/d/17HMt2Zzm5FRwCRLVQvpPXudmmuqpur_HYsEFmfIFAqE/edit?tab=t.0 can be found here]

There are

File:Az-p4620 1.png

2026-03-20T22:04:01Z

JohnDMcMaster:

File:Gold shuttle poc.png

2026-03-20T22:01:09Z

JohnDMcMaster:

Main Page

2026-03-20T21:59:19Z

JohnDMcMaster:

[[Diode]]

[[Hacker Fab Stepper]]

[[Spin Coater]]

[[Sample Library]]

[[Metrology]]

[[Gold Shuttle]]

Metrology

2026-03-20T21:58:52Z

JohnDMcMaster: Created blank page

Main Page

2026-03-20T21:58:13Z

JohnDMcMaster:

[[Diode]]

[[Hacker Fab Stepper]]

[[Spin Coater]]

[[Sample Library]]

[[Metrology]]

Main Page

2026-03-20T21:57:33Z

JohnDMcMaster:

[[Diode]]

[[Hacker Fab Stepper]]

[[Spin Coater]]

[[Sample Library]]

Metrology

Diode

2026-03-20T21:53:06Z

JohnDMcMaster: Created page with "The "hello, world" of semiconductor fabrication. We aim to do the following: * Document a clear set of steps for fabricating a diode * Document a clear set of steps for proving you made a diode * They must be "cookie cutter." You can follow them and make corrections without a deep understanding of the science TODO: * Link Hype / Carter experiments * John results?"

The "hello, world" of semiconductor fabrication. We aim to do the following:

* Document a clear set of steps for fabricating a diode
* Document a clear set of steps for proving you made a diode
* They must be "cookie cutter." You can follow them and make corrections without a deep understanding of the science

TODO:

* Link Hype / Carter experiments
* John results?

Main Page

2026-03-20T21:51:10Z

JohnDMcMaster:

[[Diode]]

[[Hacker Fab Stepper]]

[[Spin Coater]]

[[Sample Library]]

Sample Library

2026-03-20T21:50:32Z

JohnDMcMaster: Created page with "Some samples of interest that were shown off at Open Sauce 2025. The goal is to benchmark / compare some of these TODO: add images Jeri Ellsworth "mushfet". Quantity 2 https://siliconprawn.org/map/ellsworth/mushfet1/mcmaster_10x/ Hayden "apartment transistor" Someone sent us another sample (forgetting name)"

Some samples of interest that were shown off at Open Sauce 2025. The goal is to benchmark / compare some of these

TODO: add images

Jeri Ellsworth "mushfet". Quantity 2

https://siliconprawn.org/map/ellsworth/mushfet1/mcmaster_10x/

Hayden "apartment transistor"

Someone sent us another sample (forgetting name)

Main Page

2026-03-20T21:48:31Z

JohnDMcMaster: Replaced content with "Hacker Fab Stepper Spin Coater Sample Library"

[[Hacker Fab Stepper]]

[[Spin Coater]]

[[Sample Library]]

File:Logo.png

2026-03-20T21:29:04Z

JohnDMcMaster: